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"Sylph" is a super compact gas chromatograph with a simple control system that can be easily used by beginners. With automatic sampling equipped with a concentrator, complicated pretreatment is unnecessary. The gas separated in the column is detected non-destructively by a ball SAW sensor and then exhausted. Additionally, the operation panel is simple and has sufficient functionality, making it easy for beginners to set up. 【Features】 ■ Compact and energy-efficient ■ Automatic sampling with a concentrator ■ Simple control system ■ Non-destructive detection of sample gas *For more details, please download the PDF or feel free to contact us.

• Gas chromatograph

"FalconTrace" is a moisture meter equipped with a "Ball SAW sensor" that measures changes in elastic surface waves propagating over long distances with multiple round trips. We offer a lineup including the "FT-700WT Mk-II," which achieves "ultra" trace moisture measurement, and the "FT-450WT," which emphasizes device integration while maintaining high-speed response. Additionally, we have the "FT-400WT," which enables real-time measurement in the mid-range. 【Features】 ■ A series of products equipped with appropriate functions for various measurement applications, achieving miniaturization of the sensor part to flexibly accommodate various applications. ■ High sensitivity and wide range detection down to ppmv or ppbv order, ensuring that even trace amounts of moisture are not overlooked. ■ Achieves fast response with a sensing film only 10nm thick, contributing to the realization of real-time control systems for moisture levels that were previously difficult to achieve. *For more details, please download the PDF or feel free to contact us.

• Other measurement, recording and measuring instruments

Low molecular weight siloxanes are widely used as raw materials for silicone products, solvents for dry cleaning, and additives in cosmetics. Despite having a high boiling point, they have a high volatility, easily diffusing into the air at room temperature. It is known that their reattachment after volatilization can cause adverse effects such as lens fogging in semiconductor manufacturing equipment, reduced breakdown voltage of insulating films, and contact failures. In this study, we confirmed the possibility of measuring, separating, and detecting gases containing relatively low molecular weight cyclic and linear siloxanes among low molecular weight siloxanes. For details, please refer to the PDF document. We encourage you to take a look. [Overview] ■ Analysis by Sylph - Cyclic siloxanes (D3, D4, D5, D6) and linear siloxanes (M2, M3, M4, M5) among low molecular weight siloxanes were diluted with acetone solvent, injected into a gas bag filled with nitrogen, and then introduced into the Sylph for measurement. *For more details, please download the PDF or feel free to contact us.

• Other analytical and testing equipment

I would like to introduce the analysis of amine impurities in clean room atmosphere. In the fabrication of semiconductors and MEMS devices, gaseous impurities in the clean room atmosphere have become a problem due to their adverse effects. In particular, basic impurities such as ammonia and amines are known to cause shape abnormalities in chemically amplified resists. We will report on the analysis method for the amine compound 2-amino-2-methyl-1-propanol (isobutanol amine) using Sylph. For more details, please refer to the PDF document. We encourage you to take a look. [Overview] ■ Analysis by Sylph - Humidifiers containing 2-amino-2-methyl-1-propanol were introduced into a gas bag, and analysis was conducted using a WAX column. *For more details, please download the PDF or feel free to contact us.

• Other analytical and testing equipment

"Sylph" is a super compact gas chromatograph equipped with a standard automatic sampling system with a concentrator. The operating principle involves first drawing in the sample gas with a pump and passing it through a concentrator filled with an adsorbent. The flow path is then switched using a valve, and the concentrator is rapidly heated. As a result, the sample gas is released from the adsorbent and introduced into the column by the carrier gas supplied from a hydrogen storage alloy canister. The gases separated in the column are detected non-destructively by a ball SAW sensor and then exhausted. [Features] - Compact and energy-efficient → suitable for on-site analysis - Automatic sampling with a concentrator - Simple control system - Non-destructive detection of sample gas *For more details, please refer to the PDF document or feel free to contact us.

• Analytical Equipment and Devices

"FalconTrace Platinum" is a trace moisture meter capable of measuring dew points down to -90°C (0.1 ppmv). It features a fast response time that allows for the measurement of trace moisture increases from low dew points in just one second, enabling real-time inline monitoring of changes in molecular water content in industrial gases over short periods. It contributes to the stabilization of final product quality and improvement of yield in manufacturing processes such as chemicals in industrial gases, semiconductor production, and lithium-ion battery manufacturing. 【Features】 ■ Mid-range model ■ Capable of measuring dew points down to -90°C (0.1 ppmv) ■ Measures trace moisture increases from low dew points in one second ■ Trace moisture meter using "Ball SAW Sensor" ■ Useful as a quality monitoring tool for product development and manufacturing *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

Ballwave Inc. applied for and was selected for the public recruitment related to the "Research and Development Type Startup Support Project / Product Commercialization Alliance (PCA)" of the National Research and Development Agency for New Energy and Industrial Technology Development in the fiscal year 2020. In the advanced semiconductor industry, the ultra-high precision and ultra-thinning of wiring patterns formed on semiconductor substrate surfaces are progressing to extreme levels. In these advanced semiconductor processes, even minute impurities that were not previously considered can cause product defects, so it is required to reduce impurities in the raw materials used to the utmost limit. In this research, we will conduct product development of a device that can inline monitor trace moisture in special gases used in advanced semiconductor processes, based on our high-speed response, compact, and highly sensitive sensor "Ball SAW Sensor," as well as the trace moisture meters FalconTrace and FalconTrace mini. *For more details, please refer to the PDF materials or feel free to contact us.

• Other measurement, recording and measuring instruments

Ballwave Inc. has been selected for a research proposal call related to the "Open Innovation Hub for Expanding Humanity's Living Space and Activity Area through the Development of the Solar System Frontier," conducted by the Japan Aerospace Exploration Agency's Space Exploration Innovation Hub, as a problem-solving research project. In this research, we will conduct joint research with the Japan Aerospace Exploration Agency, focusing on the theme of "Development of a portable gas chromatograph with high sensitivity and high precision for various volatile substances." Our goal is to realize a portable high-sensitivity and high-precision volatile substance sensor that can be used for the detection of various gases and volatile organic compounds, as well as its social implementation and utilization in space exploration. We aim to develop a portable gas chromatograph that can achieve dimensions of approximately 100×100×100mm and a weight of around 1kg, utilizing our innovative high-sensitivity sensors, the "Ball SAW Sensor" and "Metal MEMS Column." *For more details, please refer to the PDF document or feel free to contact us.

• others

The "FalconTrace mini" is a high-speed response, handheld moisture meter capable of real-time measurement of trace moisture. The measurement range (dew point) is -70 to +4°C. An option for -90°C is also available. The interfaces support USB, Ethernet, and WiFi. 【Specifications (excerpt)】 ■ Model number: FT-300WT ■ Measurement range (dew point): -70 to +4°C (option -90°C) ■ Measurement range (PPM): 0 to 4000 ppmv ■ Minimum detection sensitivity: 1 ppmv (option -0.04 ppmv) ■ Response speed: within 1 second *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

"FalconTrace" is an ultra-trace moisture meter that quantitatively measures the water molecules present in industrial gases and natural gas in very small amounts using a ball SAW sensor. The extremely thin film of about 10nm on the surface of the ball SAW sensor captures water molecules, and since the spatial volume of the sensor cell is approximately 1ml, the response speed is extremely fast, allowing for monitoring changes in moisture levels on a second-by-second basis. [Features] ■ Extremely fast response speed allows monitoring of changes in moisture levels on a second-by-second basis ■ Separates the output of the ball SAW sensor into output values indicating moisture levels and output values indicating the average molecular weight of background gases ■ No need for recalibration for each background gas ■ Can simultaneously detect variations in components such as natural gas *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

We would like to introduce the features of the Ball SAW. It has multiple characteristics, including high sensitivity for long-distance transmission and a compact size with a diameter of 3.3mm. 【Features】 ■ High sensitivity ■ Compact size ■ High speed ■ Improved electrode structure → Simultaneous measurement of two items ■ Single crystal quartz → High corrosion resistance ■ Domestic maintenance system *For more details, please refer to the PDF document or feel free to contact us.

• Sensors

This explains the mechanism of the "Ball SAW Hydrogen Gas Sensor." Ultrasonic waves are generated by a metal thin-film electrode. These ultrasonic waves circulate around the equator and respond to slight changes in the sensing membrane. The metal thin-film electrode then receives the ultrasonic waves and can detect slight signal changes. 【Features】 ■ Ultra-high sensitivity ■ Ultra-fast response ■ Gas analysis possible anytime, anywhere ■ Surface vibrations of the quartz ball detect trace molecules *For more details, please refer to the PDF document or feel free to contact us.

• Sensors

We introduce the foundational technology of the "Ball SAW Gas Sensor." By exciting surface waves on the surface of a sphere with a width equal to the geometric mean of the sphere's diameter and wavelength, the surface waves circulate multiple times as a natural parallel beam without diffraction phenomena. The multiple circulating SAW amplifies changes in sound speed and attenuation rate along with the number of circulations, allowing for more precise measurement of these changes. By placing a sensing film on this multiple circulating propagation path, a compact, high-speed, and highly sensitive Ball SAW sensor can be obtained. 【Features】 ■ High sensitivity ■ Fast response ■ Non-destructive *For more details, please refer to the PDF document or feel free to contact us.

• Sensors

We would like to introduce our trace moisture meter, the 'FalconTrace mini (FT-300WT)', which we handle. It is compatible with air, inert gases, and other gas types (upon consultation). It boasts a response time of less than one second. 【Features】 ■ High-speed response ■ Handheld ■ Real-time measurement of trace moisture ■ Measurement range: 0–1,000 ppmv ■ Detection sensitivity: 1 ppmv *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices

"Falcon Trace" is a device that quantitatively measures the trace amounts of water molecules contained in industrial gases and natural gas using a ball SAW sensor. The extremely thin film of about 10nm on the surface of the ball SAW sensor captures water molecules, and since the spatial volume of the sensor cell is approximately 1ml, the response speed is extremely fast, allowing for monitoring changes in water content on a second-by-second basis. Additionally, the sensor's output can be separated into output values indicating water content and output values indicating the average molecular weight of background gases, eliminating the need for recalibration for each background gas. It can also simultaneously detect variations in components such as natural gas. [Features] - Extremely fast response speed - No need for recalibration for each background gas *For more details, please download the PDF or feel free to contact us.

• Other inspection equipment and devices