カノマックスアナリティカル List of Products and Services

Are you familiar with Particle Precursors? The cleaning process, which removes debris and contaminants, is extremely important for improving semiconductor yield, and foundries must manage the cleanliness of UPW (Ultra-Pure Water) and chemicals used in cleaning. Until now, liquid-phase particles have been considered a cause of yield reduction, with management focusing on keeping "the number of 20nm particles below a certain threshold." However, it has recently been recognized that contaminants, which are not visible as particles but dissolve in UPW or chemicals and appear when dried, negatively impact yield. "While they couldn't be counted in the liquid, they manifest on the wafer like a stain..." These contaminants are referred to as Particle Precursors. In an environment where terms like miniaturization and integration are prevalent, foundries and suppliers interested in managing particles and precursors in UPW (Ultra-Pure Water) and chemicals (IPA, ammonium hydroxide, hydrogen peroxide, hydrochloric acid, PGME) are encouraged to reach out for inquiries.

• Other physicochemical equipment

The "Focus LC" is a compact, lightweight, and powerful "in-situ" HPLC. It achieves performance equivalent to that of a benchtop HPLC in a portable form. The solvent consumption is extremely low, at less than 10 mL per week, resulting in minimal usage and waste, and the electricity consumption is only a fraction of that of conventional LC. This high-sensitivity product is designed with environmental considerations in mind, including low solvent and electricity usage. 【Features】 ■ Extremely low solvent consumption, making it an "environmentally friendly" HPLC ■ High-pressure gradient ■ Built-in battery allows for 6 to 10 hours of analysis ■ Compact design weighing only 8 kg *For more details, please download the PDF or feel free to contact us.

• Analytical Equipment and Devices

Compact yet achieves high mass resolution! Multi-turn time-of-flight mass spectrometer 【Applications】 ■ On-site gas analysis Real-time monitoring of process gases, combustion gases, exhaust gases, etc. ■ Material analysis High-resolution and precise mass analysis of gases generated, released, or thermally decomposed from various materials. ■ Environmental analysis Real-time atmospheric analysis in the field, dioxin analysis requiring high resolution. ■ Analysis of unknown components Qualitative analysis of unknown components through high-resolution and precise mass analysis. *For more details, please download the PDF or feel free to contact us.

• Other physicochemical equipment

This document is a comprehensive catalog of "particle measurement and analysis equipment" handled by our company. We develop mass classification devices that can classify particles based on mass standards, as well as nano samplers that can classify 100 nm particles under atmospheric pressure. [Contents] ■ Black carbon measurement devices ■ Particle collectors ■ Particle size/mass classifiers ■ Particle measurement devices ■ Diluters ■ High-resolution time-of-flight mass spectrometers *For more details, please refer to the PDF document or feel free to contact us.

• Wind Speed/Volume Meter

By analyzing the behavior of gases that are released from materials when heated or generated through thermal decomposition, it is possible to understand the state of gas adsorption and chemical adsorption on the materials, as well as the thermal properties of the materials. Materials and products can emit gases when exposed to various conditions. These gases can, in some cases, affect the human body or cause defects in the quality and performance of products, potentially leading to issues even in trace amounts. Using the "infiTOF-UHV," it becomes possible to understand the behavior of desorbed gases in high-resolution mode. 【Features (infiTOF-UHV)】 ■ Multi-turn TOF analyzer ■ Real-time analysis with high resolution, resolution > 30,000 ■ Suitable for gas analysis, measurement range m/z 1 to 1,000 ■ Compact size for installation and measurement anywhere ■ Power supply operates at 100–230 VAC, 500W, ensuring energy efficiency without location constraints *For more details, please refer to the PDF document or feel free to contact us.

• Analytical Equipment and Devices

The semiconductor process includes various steps such as crystal growth (epitaxial growth), film deposition (CVD, ALD), etching, and cleaning. Additionally, a variety of raw material gases are used in these processes. By monitoring the reaction products, decomposition products, and residual components in the process chamber in real-time, we can improve yield, enhance productivity, and contribute to the development of next-generation semiconductor technologies. The Kanomax 'infiTOF', a mass spectrometer with high resolution and real-time measurement capabilities, supports the research, development, and manufacturing of higher quality products. 【Solutions】 ■ Real-time measurement of process gases ■ Portability suitable for on-site measurements *For more details, please refer to the PDF document or feel free to contact us.

• Analytical Equipment and Devices

The "Fast CPC (MODEL 3650)" is an ideal device that can measure rapidly changing aerosol concentrations and electrical mobility particle size distributions with a fast response time. In addition to the conventional method of condensing particles in supersaturated alcohol vapor, it prevents the diffusion of vapor through laminar flow in the condenser section, allowing for the growth of micron-sized droplets nucleated by nanoparticles as small as 1.9 nm. These droplets are then detected and counted using light scattering. 【Features】 - Compact and robust, suitable for field measurements - Resistant to vibrations and pressure changes, enabling mobile measurements - Built-in flow meter and pump *For more details, please refer to the PDF document or feel free to contact us.

• Particle Counter

The "Nano Aerosol Generator (NAG) MODEL3250" is a new nebulizer capable of generating droplets with a peak diameter of less than 550nm. By incorporating a droplet collision plate to minimize the size of the sprayed droplets, it has achieved a reduction in non-volatile (residual) coating. As a result, it is possible to reduce the non-volatile residue in the generated aerosol particles. 【Features】 ■ Capable of generating droplets with a peak diameter of less than 550nm using a small amount of sample ■ Can minimize the impact of non-volatile residue in the droplets ■ No need for charge neutralizers, discharge corona, or radiation sources *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

"PAMS" is a portable particle size distribution measuring device with improved maintainability due to its detachable charge feature. It is compact and easy to carry, as it is battery-operated and does not require a PC. It can measure particle size distribution in two ranges: wide range and high resolution. The adoption of a neutralizer using a bipolar charging method eliminates the need for radioactive materials. 【Features】 ■ Detachable charge feature ■ Improved maintainability ■ Compact and easy to carry ■ Capable of measuring particle size distribution in two ranges *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

We are developing equipment such as mass classification devices that can classify particles based on mass standards and nano samplers that can classify 100nm particles under atmospheric pressure. The "Classification, Measurement, and Generation Device Product Catalog" includes items such as the "Black Carbon Measurement Device," "Particle Collector," and "Particle Size/Mass Classifier." [Contents (excerpt)] ■ Black Carbon Measurement Device ■ Particle Collector ■ Particle Size/Mass Classifier ■ Particle Measurement Device ■ Particle Generator *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "Nano Sampler II" is a nano sampler capable of classifying particles down to 0.1μm at atmospheric pressure. For PM0.1 classification sampling, LPI is generally used; however, LPI requires reducing the pressure within the device to near vacuum levels, raising concerns about changes in particle size and composition during collection. In the PM0.1 stage of this product, it is possible to conduct large-scale sampling at low pressure loss without reducing pressure. The sample flow rate is 40L/min, allowing for the collection of sufficient sample quantities for weighing and analysis in a short time. 【Features】 ■ No pressure reduction in the PM0.1 stage, with low pressure loss ■ Capable of large-scale sampling at once ■ Allows for the collection of sufficient sample quantities for weighing and analysis in a short time *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "Handheld CPC" is a portable condensation particle counter that detects particles from a minimum diameter of 15nm. In addition to being able to store measurement data in the main unit, measurement control via dedicated software is also possible. It can be used not only for measuring engine exhaust, atmospheric conditions, and indoor environments but also for measuring ultrafine particles in clean rooms. 【Features】 - Detects particles from a minimum diameter of 15nm - Measurement data can be stored in the main unit - Usable for ultrafine particle measurement in clean rooms - Battery-operated for up to 5 hours of measurement *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments
• Particle Counter

The "Black Carbon Monitor (BCM)" continuously collects black carbon from the atmosphere by thermally extracting it onto a filter and measures the concentration by detecting changes in light absorption with a photodiode. Automatic feeding of the filter allows for continuous measurements over long periods. It is suitable for investigating and monitoring black carbon that diffuses from remote locations. 【Features】 ■ Continuous measurements over long periods are possible ■ Improved measurement accuracy through pre-treatment of sample air ■ Real-time measurement of black carbon concentration in the atmosphere ■ High detection sensitivity allows for measurement in low concentration areas *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "TDC584" is a static elimination device for air filters that complies with ISO16890-4. It allows for quick work using a small amount of isopropyl alcohol (IPA). This static elimination neutralizes the collection power caused by static electricity. This product complies with the 2019 edition of JIS B9908. 【Features】 ■ Complies with the 2019 edition of JIS B9908 ■ Static elimination device for filters in accordance with ISO16890-4 ■ Allows for quick work using a small amount of IPA ■ Safe handling achieved by integrating cleaning and exhaust *For more details, please refer to the external link page or feel free to contact us.

• Ionizers and static eliminators
• filter

The LAP340 is a device suitable for evaluating the collection efficiency of air filters in accordance with ISO16980. It can divide the particle size range from 0.3μm to 10μm into 16 channels. With a high sampling flow rate of 28.3L/min, it allows for a reduction in evaluation time. This product complies with JIS B9908 issued in 2019. **Features** - Complies with JIS B9908 issued in 2019 - Measurable particle size range from 0.3 to 10μm, can be divided into 16 channels - High sampling flow rate of 28.3L/min - Maximum measurable concentration of 980,000 particles/cf (35 particles/cm3) *For more details, please refer to the external link page or feel free to contact us.*

• filter
• Particle Counter

The "SAG440" is a device suitable for generating load dust in accordance with ISO 16980. It can continuously and for long periods generate dust from 11 types of test powders listed in JIS Z 8901, as well as ASHRAE 52.2 dust. This product complies with the JIS B9908 issued in 2019. [Features] ■ Load dust generation device compliant with ISO 16980 ■ Capable of generating stable and high-concentration powders using stepping motor technology ■ Continuous and long-term generation possible *For more details, please refer to the external link page or feel free to contact us.

• filter
• Other powder equipment

The "Model3216" is a particle generation device that stably produces standard particles for various applications, including animal exposure experiments for drugs, chemicals, and dust, as well as dust performance testing for filters, fluorescent lights, office equipment, and other devices. Developed as an upgraded version of the Model3211, it features innovative designs in the pitch and thickness of the screw feeder, along with adjustments to the mixing ratio of sample powder and glass beads, allowing for the stable generation of a large quantity of particles. It can be utilized in various fields that require standard particles. This product complies with the JIS B9908 standard issued in 2019. **Features** - Complies with the JIS B9908 standard issued in 2019 - Suitable for various dust sample analyses - Capable of long hours of continuous operation - Can generate particles in the specific dispersion state of the powder sample - Exhibits minimal fluctuation in dust concentration, ensuring high stability - Concentration levels can be easily controlled - The particle size distribution of the generated particles remains stable even with changes in the sample's particle size distribution *For more details, please refer to the external link page or feel free to contact us.*

• filter
• Other powder equipment

The "DT-IMS (Model 3006)" is a drift tube ion mobility particle size distribution measurement device. 【Features】 • Classification range: 2.0 ~ 40 nm • High resolution (Zp/∆Zp) > 20 (2 ~ 10 nm) • Classification time: 2.0 ~ 10 nm in less than 10 seconds, 2.0 ~ 40 nm in 60 seconds • Touch panel color LCD interface • Analysis through high-throughput spraying of colloidal samples • Characterization of particle generation and combustion processes *For more details, please feel free to contact us.

• Analytical Equipment and Devices