ネクス List of Products and Services

Application: Organic solvent dip coating Multipurpose processing of functional films, wafers, optical lenses, and precision parts Delivered as a set with DIP processing equipment LD, organic processing tank, ULD Automatic transport robot, standalone shaking Stroke MAX 400mm, variable speed Automatic fire extinguishing system (optional)

• Optical Experimental Parts

<Nano Spray Coater> - Explosion-proof specifications - Coating liquids: Organic solvents, resist, ink, paint. - Substrate size: 200mm□ (MAX) - Nozzle: Flat spray type, full cone type, rotating nozzle (nozzle interchangeable) - Nozzle pressure: 0.5 MPa - Coating film thickness: 1-5 µm - Film thickness accuracy: ±3% - Nozzle: Flat spray type, full cone type, rotating nozzle

• Optical Experimental Parts

<Dip Coater> - Equipment for development that coats optical lenses, silicon wafers, and glass substrates on both sides - Substrate size: Φ25mm to 370×470mm - Up and down, stirring transport drive - Left and right transport drive - Chemical circulation system within the processing tank - Internal humidity management system

• Optical Experimental Parts

<Precision Slit Coater> - Conveyance Drive: Linear Motor, Linear Guide, Servo Motor - Coating Supply Method: Syringe Pump (proprietary in-house development) - Precision Stage: Granite Base (Flatness: 10μm or less) - Compatible with low to high viscosity (a few cps to 10,000 cps) Organic EL, Photoresist, Polyimide, Ink Materials, Curing Resins, etc.

• Optical Experimental Parts

- Compact tabletop spin coater (Model: labo-coat-2) - Affordable pricing, compact design - Lightweight handheld type for easy portability - Substrate suction table: Material - Delrin * Standard accessory of the main unit. Shape and size can be changed. - Suction method: Vacuum pump suction * The vacuum pump is built into the main unit. - Easy operation possible with a uniquely developed control board system. (Two operation buttons)... rotation speed, acceleration time, rotation hold time, deceleration time * Even those who are not good at operating machinery can easily set it up with confidence. * Demo units are available for loan.

• Optical Experimental Parts

- Small tabletop spin coater for R&D - Affordable pricing, compact design - Lightweight handheld type for easy portability - Substrate suction table: material Delrin * The suction table is a standard accessory of the main unit. (Shape: size to be discussed) - Suction method: suction by vacuum pump * The vacuum pump is built into the main unit - Simple operation possible with a uniquely developed control board system. (Two operation buttons)... rotation speed, acceleration time, rotation hold time, deceleration time * Easy button operation settings even for those who are not good at operating machines or devices - Power supply: one location, main unit only. AC 100V power supply 2A - Device models: two types labo-coat (for 1 inch 25mm□) labo-coat-2 (for 2 inches 50mm□)

• Optical Experimental Parts