AOS List of Products and Services

We offer O-ring products that excel in plasma resistance and heat resistance. Our perfluoroelastomer exhibits minimal weight change under plasma irradiation and low particle generation, along with excellent chemical resistance and low gas permeability. Please feel free to contact us if you have any inquiries. 【Product Lineup】 ■ Plasma-resistant, low-particle specialty products ■ Universal products for plasma and gas deposition processes ■ SACVD and ashing gas specialty products *For more details, please download the PDF or contact us.

• Rubber

We offer rubber seal products that achieve extremely low elution properties, which were not possible with conventional special fluororubber. These materials have excellent heat and water resistance, as well as resistance to various chemicals and fuels, and comply with food sanitation laws. Please feel free to contact us if you have any inquiries. 【Product Lineup】 ■ Large seals for semiconductor manufacturing equipment ■ Gaskets for semiconductor manufacturing equipment ■ O-rings and seals for fuel cells *For more details, please download the PDF or contact us.

• Rubber