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Optical Instruments
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ミワオプト

addressTokyo/Ota-ku/5-30-5 Nambakubo, Room 502
phone03-5742-2181
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last updated:Oct 17, 2023
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Automatic Ellipsometer System

The new measurement method using four detectors has no moving parts, which improves the reliability of the system.

We handle the automatic ellipsometer systems manufactured by Gartner. The S series enables ultra-fast measurements, allowing for the measurement of rapidly changing substances. Additionally, the LM series comes standard with autofocus and auto-tilt features, achieving even higher precision and reproducibility, resulting in high reliability. This system offers measurement methods based on the Stokes method and various measurement types. Please feel free to contact us if you have any inquiries. 【Product Lineup】 ■ S Series: Capable of accommodating up to 3 wavelengths ■ LM Series: Supports up to 300mm *For more details, please download the PDF or feel free to contact us.

  • Coating thickness gauge

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Spectroscopic Ellipsometer System

Newly supports DUV. It is compact and offers excellent cost performance.

We handle the spectroscopic ellipsometer systems manufactured by EllipsoTechnology. With user-friendly software and an easy-to-introduce low price. Additionally, we offer a wide range of options (automatic stage, auto angle, auto focus & auto tilt), and we also support wafer mapping. We conduct both free and paid sample measurements, so please feel free to contact us. 【Features】 ■Compact ■Support for DUV ■Extensive support system ■Customization options available, etc. *For more details, please download the PDF or feel free to contact us.

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