テクメイション List of Products and Services

We accept introductions from a wide range of series standard products and custom manufacturing requests.

• Other semiconductor manufacturing equipment

Equipped with high efficiency and durability, it can be offered in a wide variety of shapes and materials to suit different applications.

• Other semiconductor manufacturing equipment

In addition to standard disk shapes, we also offer special-shaped disks tailored to specific applications. A variety of materials are available in our product lineup.

• Other semiconductor manufacturing equipment

It is possible to quickly replace only the sparger part with a spare sparger without removing all the sparger equipment.

• Other semiconductor manufacturing equipment

Custom-made options are available to meet the specifications and shapes requested by the customer.

• Other semiconductor manufacturing equipment

It controls the flow rate without using needle valve adjustments or orifices in an environment where flow conditions are relatively constant. The shape of the connection fittings is available in a variety of lineups to suit your usage environment.

• Other semiconductor manufacturing equipment

Cost-effective products such as mass flow controllers, needle valves, and other flow control devices that maintain relatively constant flow conditions. Compared to needle valves and orifices that adjust flow, they control flow without causing turbulence in the gas.

• Other semiconductor manufacturing equipment

Protecting key components such as mass flow controllers, regulators, and valves in semiconductor gas supply systems.

• Other semiconductor manufacturing equipment

The diffuser filter quickly restores atmospheric pressure during the vacuum chamber's atmospheric recovery without causing disturbances, reducing cycle time and improving throughput. It withstands high operating pressure and is a high-lifespan product with over 3 million cycles.

• Other semiconductor manufacturing equipment

Leveraging Mott's years of filter technology and experience, we provide high-performance products with large flow rates.

• Other semiconductor manufacturing equipment

An inline filter for liquid sources that uses elements based on Mott's proprietary technology.

• Other semiconductor manufacturing equipment

It is a low-cost filter for inert gases, ideal for replacement of filters made with Teflon elements.

• Other semiconductor manufacturing equipment

W seal and C seal specifications available for 1.125" and 1.5" integrated panel standards.

• Other semiconductor manufacturing equipment

Despite being capable of handling large flow rates, it achieves a size that is one-third that of conventional products without compromising filtration accuracy.

• Other semiconductor manufacturing equipment

A wide range of products capable of handling various types of gases, including corrosive gases.

• Other semiconductor manufacturing equipment

A wide range of products tailored to your gas type and usage flow rate is available.

• Other semiconductor manufacturing equipment

Obtained the stringent UL991 and SEMI-S2 certifications that cannot be acquired by other companies. A structure that eliminates malfunctions caused by runaway or potential bugs without using a microcontroller. Compact and integrated design. We can accommodate various requests (such as corrosion-resistant types). Various optional settings are available for safety and ease of use.

• Sensors

The VT series is a compactly designed three-way air-operated valve that can handle high pressures up to 68.9 MPa (only in SUS316). It features a well-balanced poppet design that ensures excellent durability.

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The CC series is a precision metering valve capable of handling a maximum pressure of 68.9 MPa. The maximum CV values are 0.00005 and 0.00125, and it allows for high-precision flow control with more than 20 handle rotations from fully closed to fully open. Additionally, the non-rotating stem prevents seat wear. 【Features】 - Designed for use with both liquids and gases - Compact and usable from low to high pressure - Controls flow with excellent precision - Suitable for both negative and positive pressure applications

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These are safety valves manufactured by Takei Manufacturing Co., Ltd., ranging from low pressure (0.01 MPa) to ultra-high pressure (130 MPa), and from cryogenic temperatures (−269°C) to high temperatures (500°C). As a certified business by the Minister of Economy, Trade and Industry, we can supply certified products. We also offer maintenance after use.

• valve

■ Products for the latest technology OEM gas systems ■ Enhanced mass flow performance with ultra-high sensitivity pressure regulation ■ Excellent performance across a wide range of applications ■ Outstanding DROOP and reproducibility ■ Surface finish of 10Ra or 5Ra

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High-sensitivity metal diaphragm pressure reducing valve

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■ VCR connection ■ Positive seal

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■ The diaphragm is of the tide type. ■ You can choose the seat material. ■ VCR connection.

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Maximum inlet pressure 2.07 MPa / Outlet pressure range up to 2.07 MPa! ■ High flow rate, with minimal pressure drop during adjustment. ■ 5 types of outlet pressure ranges.

• valve
• Pneumatic Equipment

■High precision ■Very accurate, designed for high flow with minimal pressure drop, ideal for low-pressure purge regulators.

• valve
• Pneumatic Equipment

The Tescom ER5000 series is an electronically controlled pressure regulator that incorporates a PID controller. With feedback control, it can maintain high precision pressure control even when the process flow rate changes. Additionally, it supports programmed operation, allowing customers to set various programs themselves. In addition to being used as a standalone pressure reducing valve, it can be combined with various Tescom pressure regulators to enable pressure control from liquids, gases, and vacuum environments up to over 100 MPa, making it suitable for a wide range of applications. Pressure settings can be made via analog signals (4-20mA, 1-5V) or through USB and RS485 from PC/AT compatible machines or analog setting devices. Dedicated software for setting PID parameters, programmed operation, and monitoring SP and PV values is included (compatible with Windows 10). 【Features】 - Available models compliant with explosion-proof standards such as CSA, IECEx, and ATEX - Versatile combinations with pressure reducing valves and back pressure valves - Control possible within the sensor accuracy range depending on PID settings - Ideal for various testing and automated operations.

• Pressure Control

The 26-1000 series is a super high-pressure pressure reducing valve capable of reducing pressures up to 68.9 MPa to a maximum of 68.9 MPa across seven adjustable pressure ranges. There is also an option available for pressure adjustment up to 103.4 MPa. This regulator comes standard with a built-in vent valve, allowing for the release of pressure from a closed piping system through the pressure reducing valve. For flammable gases and liquids, options with non-venting or collection ports are also available. 【Features】 - High-temperature models are available (MAX 204°C) - The outlet pressure range can be changed by replacing internal components - Comfortable operation with a large hand knob - Options available for adjustable pressures up to 138 MPa - Various inlet and outlet port types - Can be combined with electronic pressure regulators in air-driven types - Selection of O-rings and resin materials is available

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The 26-1100 series is a compact-sized dome-shaped pressure reducing valve for high flow rates. It performs highly sensitive pressure regulation through diaphragm control. With the adoption of a balanced main valve, it minimizes instantaneous pressure drops and reduces the load on the seat area. 【Features】 - Highly sensitive rubber diaphragm - Easy maintenance due to the modular structure of the valve section - Adoption of a balanced main valve - Compatible with high-precision external sensors

• Flow Control
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The 26-1200 series is a dome-shaped pressure reducing valve for high flow rates. It performs highly sensitive pressure regulation through diaphragm control. With the adoption of a balanced main valve, it minimizes instantaneous pressure drops and reduces the load on the seat area. The body material is made of stainless steel, allowing for precise pressure control up to 41.3 MPa. 【Features】 - High-sensitivity rubber diaphragm - Easy maintenance due to the modular structure of the valve - Adoption of a balanced main valve - High-precision external sensor can also be selected as an option

• Flow Control
• Pressure Control
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The 26-1500 series is a compact gas pressure regulator. It features a large diameter rubber diaphragm, allowing for highly sensitive and precise pressure adjustment. This regulator can adjust the inlet pressure up to 41.3 MPa and the outlet pressure from 0.03 MPa to a maximum of 1.72 MPa. 【Features】 - Non-venting type - Compact design - Highly sensitive rubber diaphragm

• Flow Control
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The 26-1600 series is a pressure reducing valve equipped with a self-venting mechanism that allows for pressure relief even in closed piping systems at the end. It uses a large-diameter rubber diaphragm, enabling highly sensitive and precise pressure adjustment. This pressure reducing valve can adjust inlet pressures up to 41.3 MPa to an outlet pressure of 0.01 MPa. 【Features】 - Highly sensitive rubber diaphragm - Self-venting type

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The 26-2000 series is designed for high-pressure liquids or gases and is an ultra-high pressure pressure relief valve capable of reducing pressure from up to 103.4 MPa to multiple ranges of up to 68.9 MPa. It comes standard with a built-in capture vent mechanism for collecting, allowing the fluid downstream of the pressure relief valve to be released through the vent port. Additionally, depending on the application, options for manual spring-loaded, air-driven dome-loaded, and air actuator types are available. 【Features】 - Standard adoption of a repairable capture vent - Three types of drive methods can be selected - Various O-ring materials can be chosen to suit the fluid - A variety of connection standards and port shapes are available for selection

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The 44-1100 series is a high-pressure pressure reducing valve capable of reducing pressures up to 68.9 MPa to a maximum of 41.3 MPa, with a six-stage adjustable pressure range. The adjustment range can also be easily changed by swapping internal components in a single unit. This regulator comes standard with a built-in vent valve, allowing for the release of pressure from a closed piping system through the pressure reducing valve. There is also a non-vent option available for flammable gases and liquids. 【Features】 - Built-in self-venting function as standard - Standard equipped with a 40μ internal filter - A variety of options available for O-ring materials tailored to different fluids

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The 44-1300 series is a pressure reducing valve that can safely reduce pressure from up to 31.0 MPa to below 10.3 MPa at a high flow rate. It features a partition plate built into the lower part of the sensor to minimize hunting, and a balanced main valve that provides stable secondary pressure. This regulator comes standard with a vent valve that allows for pressure release in piping systems with closed ends. There is also a non-vent option available for hydraulic systems. 【Features】 - CV values of 0.8 and 2.0 are selectable - Utilizes a balanced valve - Self-venting function is standard (non-vent option is also available) - Various options available for high temperature and high pressure specifications, among others.

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The 44-1500 series is a pressure reducing valve for high flow and low pressure applications. The balanced valve design allows for stable outlet pressure and accurate pressure adjustment with a large sensor. It is equipped with a built-in capture vent function as standard, making it suitable for use with liquids. 【Features】 - Balanced valve design - Standard equipped with capture vent function - Low droop - Options for manual types: spring-loaded, dome-loaded, and air-loaded

• valve
• Pneumatic Equipment

The 44-1800 series is a compact and economical pressure reducing valve for high pressure applications. The pressure control using a piston-type sensor safely and reliably reduces the inlet pressure of 41.3 MPa to between 0.34 and 17.2 MPa. 【Features】 - Compact design suitable for high pressure - Optional self-venting feature available

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The 44-2200 series is a compact and low-cost pressure reducing valve for high-purity fluids, widely used for regulating corrosive and non-corrosive gases or liquids. The body material is available in four types: 316 stainless steel, brass, Hastelloy, and Monel, allowing you to choose according to your application. The metal diaphragm with concentric wave patterns enables highly sensitive pressure control. Additionally, there are no issues such as gas adsorption due to the metal-to-metal diaphragm seal. 【Features】 - High-performance metal diaphragm type - Versatile pressure reducing valve suitable for various gases and liquids - Secondary side adjustable pressure can accommodate up to 3.44 MPa - Numerous optional components are available

• Flow Control
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■Usable with high purity due to the metal diaphragm ■Achieves stable control pressure

• Flow Control
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The 44-3200 series is an optimal pressure reducing valve for applications requiring high flow rates, such as purge lines, with high-purity gas systems. It uses a large main valve with a CV value of 1.0. For high-pressure types on the inlet side, a balanced main valve is used to suppress pressure fluctuations, while for low-pressure types, a non-balanced main valve is adopted to ensure reliable valve closure. 【Features】 - High-performance metal diaphragm type - Secondary side adjustable pressure supports up to 1.37 MPa - Compact design

• Flow Control
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The 44-3400 series is a two-stage pressure reducing valve designed to provide stable secondary pressure in response to fluctuations in inlet pressure. The variation rate of secondary pressure relative to inlet pressure is 0.04%. The products made of 316 stainless steel have gas-contacting components made of 316 stainless steel, Teflon, and Kel-F, making them suitable for use with corrosive fluids. Additionally, the stainless steel products come standard with a repair bonnet for gas release in case of abnormal conditions. 【Features】 - High-performance metal diaphragm type - Suitable for high-purity gases and corrosive gases - Secondary side pressure can accommodate up to 1.72 MPa - Being a two-stage design minimizes the impact of changes in supply pressure

• Flow Control
• valve

Maximum inlet pressure 41.38MPa / Outlet pressure 0.34-10.34MPa! ■ Adjustable bias pressure range ■ Self-vent (capture)

• Flow Control
• valve

■Available in brass or stainless steel ■Adopts a piston-type sensor and a balanced main valve

• Flow Control
• valve

The 44-4600 series is an absolute pressure regulator that can reduce the inlet pressure from vacuum to 0.2 MPaA, making it ideal for applications that require pressure regulation near atmospheric pressure. The diaphragm features concentric waveforms, resulting in highly sensitive pressure control. This regulator is designed for high-purity gas supply systems, and the gas-contacting parts are made solely of 316 stainless steel, Teflon, and Elgiloy, allowing it to be used with corrosive gases. 【Features】 - High-performance metal diaphragm seal - Suitable for high-purity gases and corrosive gases - Optional maximum inlet pressure can be supported up to 24.1 MPa - Optional dome-loaded or air-loaded types are also available

• valve

A compactly designed pressure reducing valve.

• valve
• Pneumatic Equipment