Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.
★ High-speed response is achieved through the laminar flow method (differential pressure type).
★ Quickly follows flow changes. High-speed control response allows you to achieve the desired flow in a short time.
★ Flow settings can be made not only through front switch operation but also via analog input and RS-232C communication.
★ Standard equipped with mass flow output of 0-5VDC. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added.
★ A wide lineup ranging from a small 0.5 SCCM type to a large 5000 SLPM type.
★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation.
For more details, please contact us or download the catalog.


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