100mm stroke long-stroke and high-resolution positioning stage
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.
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basic information
Minimum resolution: 50nm or 100nm Maximum movement speed: 10mm/sec (when using FC-411 or FC-111) Stroke: 100mm Compatible controllers: FC-411 or FC-111 ■For details, please request documentation or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.