It reduces the chances of liquid contacting the walls of the vaporizer, allowing for efficient vaporization.
This is a vaporizer suitable for the vaporization of easily thermally decomposable liquids such as high-k materials and various metals. 【Features】 ○ The liquid has minimal contact with the walls of the vaporizer (made of metal), allowing for efficient vaporization with light contact. ○ High-efficiency vaporization achieved through atomization of droplets and fine particle generation by blow gas. ○ When combined with the liquid mass flow meter LM-3000L series, it allows for precise flow control of liquid materials and efficient vaporization (US PAT.5372754). ○ A vaporizer that vaporizes easily thermally decomposable liquids at low temperatures. *For other functions and details, please download the catalog.
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basic information
○ The liquid has little opportunity to contact the walls of the vaporizer (made of metal), allowing for efficient vaporization with minimal contact. ○ High-efficiency vaporization through atomization by the atomizer and fine particle generation by the blow gas. ○ By combining with the liquid mass flow meter LM-3000L series, liquid materials can be precisely controlled in flow rate and efficiently vaporized (US PAT. 5372754). ○ A vaporizer that vaporizes easily decomposable liquids at low temperatures.
Price range
P5
Delivery Time
P4
Applications/Examples of results
【Usage】 ○ Vapor supply of various liquids for semiconductor manufacturing processes ○ CVD, oxidation, and diffusion applications
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.