For improving the purity of hydrogen gas: Inline gas purifier Fine Purifier
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Inline ultra-high purity gas purifier Fine Purifier (hydrogen gas purifier) for improving hydrogen gas purity.
Purifies various impurities in hydrogen gas (O2, CO, CO2, H2O) to below 1 ppb. The flow rate range is up to 200 NL/min. Standard equipped with a 0.003 µm particle filter. It can be reused repeatedly by regeneration.
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basic information
Purifies various impurities in hydrogen gas to below 1 ppb. The flow rate range is up to 200 NL/min. Equipped with a standard 0.003 µm particle filter. Can be reused by regeneration.
Price information
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Applications/Examples of results
It is used for semiconductor manufacturing equipment, analysis equipment, carrier zero gas, and atmosphere adjustment.
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Company information
Osaka Gas Liquid Co., Ltd. was established in 1991 as a wholly-owned subsidiary of Osaka Gas. The company focuses on the manufacturing and sales of industrial gases and dry ice utilizing the cold energy from liquefied natural gas (LNG) imported by Osaka Gas, as well as developing low-temperature grinding using liquefied nitrogen and related industrial gas technologies in collaboration with group companies.