Organic EL Vacuum Deposition Device
The mask alignment mechanism achieves nano-order alignment using a fine motion piezo XY table and a coarse motion stepping motor XYΘ table.
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basic information
This is a device that aligns the EL substrate and mask in a high vacuum and performs vacuum deposition using evaporation sources such as E-gun and K-cell.
Price information
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Delivery Time
P4
Applications/Examples of results
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Company information
The roots of our technology lie in vacuum. In particular, vacuum sealing technology is a crucial final process that affects the quality of LSI and electronic components. Our vacuum sealing equipment has achieved this with high precision, low cost, and high yield, leading to its adoption by major semiconductor manufacturers and marking the beginning of high recognition for our technology.