Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S Series
By reducing the footprint, it is suitable for the transport of small-diameter wafers within semiconductor manufacturing equipment and inspection equipment, allowing for a more compact equipment layout.
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basic information
【Features】 ○ Arm variation: 100mm ○ Z-axis variation: 200mm, 300mm ○ Load capacity: Equivalent to 0.5kgf or less at the third joint of the arm ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use two-phase pulse motors ○ High-speed and high-precision wafer transport through S-curve acceleration and deceleration control ○ Wafer holding: Vacuum suction, drop-in, edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
