Vertical rotation edge grip type wafer flatness measurement device
The ultra-precision X-axis and θ-axis serve as the measurement standards. In addition to the wafer thickness deviation information, the shapes of both sides of the wafer can now be analyzed.
Inquire About This Product
basic information
The NanoMetro TT series is a wafer flatness measurement device of the vertical rotation and edge grip type. It allows for high-precision automatic measurements using cassette-to-cassette, with a minimum edge exclusion of 1mm. Additionally, the evaluation criteria are in accordance with SEMI standards.
Price information
-
Delivery Time
P4
Applications/Examples of results
Model: NanoMetro 300TT NanoMetro 200TT Measurement Range: φ300mm φ200mm Display Resolution: 1nm Measurement Head: Non-contact Laser Displacement Meter Measurement Method: Vertical Rotating Method
Company information
Kuroda Seiko Co., Ltd. was founded in 1925 as Kuroda Gauge Manufacturing Co., Ltd., and later changed its name to the current one, continuing to this day. During this time, we developed electric hydraulic pulse motors as servo technology, which was essential for controlling NC machine tools, based on the precision machining technology we have cultivated. We have engaged in various technological and product developments, receiving the first Mechanical Vibration Association Award, and have been highly regarded in the industrial sector. The electronics industry has now made remarkable advancements in semiconductors and information communication devices due to the progress in the development and utilization of various electronic materials and liquid crystal technologies, and our advanced technology has also been applied in these fields. On the other hand, as various industries develop, the sophistication and diversification of needs have progressed, making our responsibilities increasingly important. We are committed to passing down our traditional technologies and skills while utilizing diverse and advanced technologies, continuously challenging ourselves to engage in research and development with an eye on the future. We will continue to pursue our corporate philosophy of "P&P"—enhancing precision and productivity in manufacturing—while valuing the trust we build with our customers.
