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  6. Oil Rotary Vacuum Pump VD Series

Oil Rotary Vacuum Pump VD Series

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VD Series

last updated:Jan 27, 2016

アルバック/ULVAC, Inc.
アルバック/ULVAC, Inc.
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This is an oil rotary vacuum pump developed as a "low noise type pump." [ULVAC]

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

    Other pumpsVacuum pump
06m_vd.jpg

Oil Rotary Vacuum Pump VD Series

06m_vd.jpg
06m_vd.jpg
  • Related Link - http://www.ulvac.co.jp/products_j/components/vacuu…

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basic information

【Features】 ○ Achieves low noise through optimized design ○ Excellent maintainability → The pump body can be detached without removing the vacuum piping for maintenance (excluding VD151 and VD201) → Equipped with a pump oil sight glass and drain valve for easy oil changes and daily inspections ○ Adoption of a forced lubrication system that minimizes exhaust speed reduction even during exhaust near atmospheric pressure → By using the optional oil mist trap and oil return mechanism, VD301, VD401, and VD601 can operate continuously in the exhaust mode across all pressure ranges below atmospheric pressure ○ All models unified with totally enclosed external fan type three-phase AC motors → VD151 and VD201 support multi-voltage → VD301 to VD901 can choose between 200V class and multi-voltage → Compliant with high efficiency regulations (GB3/IE2/EPAct) ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Applications】 ○ Vapor deposition equipment, sputtering equipment, ion plating equipment ○ Analyzing instruments, leak testing equipment ○ Gas replacement, filling, vacuum insulation ○ Vacuum drying, freeze drying, vacuum degassing, vacuum packaging, vacuum adsorption, vacuum molding, and various other vacuum devices ● For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VD Series

Oil Rotary Vacuum Pump VD Series

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Company information

アルバック/ULVAC,

アルバック/ULVAC, Inc.

Electronic Components and Semiconductors

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ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.

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