It has a structure that allows for easy maintenance, making it possible to reduce running costs. 【ULVAC】
This is a reverse magnetron type cold cathode gauge from the G-TRAN series. Since it does not use a filament, there is no concern about sensor wear or damage. Additionally, its structure is designed for easy maintenance, allowing for reduced running costs. 【Features】 ○ Transducer specification → If a pressure display is not required, it reduces costs associated with vacuum gauges in the display configuration, saves space around the control panel, and simplifies wiring. ○ Maintenance → The measuring element can be easily maintained by the customer. ○ Filament-free → Since it does not use a filament, regeneration is possible. ○ Control output signal → Capable of outputting two set points. ○ Measurement value output signal → Pressure output is 0 to 10V (non-linear output). For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Type: Sensor Unit ○ Model: SC1 ○ Compatible Sensors: C-21, 23, 24, 25 ○ Measurement Pressure Range: 1.0×10^-5 to 1.0 Pa ○ Measurement Accuracy: +100%, -50% (1.0×^-4 to 1.0×10^-1) ○ Operating Temperature Range: 10 to 40℃ ○ Measurement Value Output: Non-linear output ⇒ DC 0V to 10V (when HV-OFF, 10V) ○ SETPOINT1/2 Adjustment Output: Non-linear output ⇒ DC 0 to 10V ○ Control Input Signal: HV ON/OFF ○ Output Signal: Open collector, negative logic ○ Control Output Signal: Discharge confirmation / Setpoint 1/2 ○ LED Display: Power, HV, Pressure Protection, Setpoint 1/2 ○ Power Supply: DC 24V±2V, 150mA ○ Input/Output Connector: D-sub-15 pin (M2.6 screw) ○ Body Weight: 430g (excluding sensor) ○ Accessories: One set of input/output connectors, one instruction manual ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ For process control of various vacuum devices, including semiconductors and electronic components ○ For process control of various industrial equipment, including furnaces ○ For process control of various manufacturing devices with multiple process chambers, such as inline and batch types ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.