The sensor part has a monolithic structure made of ceramic, offering excellent reproducibility and stability. [ULVAC]
The CCMT-D series is a capacitance manometer that detects pressure changes through the deformation of a diaphragm made of ceramic (alumina) in response to gas pressure variations, with the corresponding change in capacitance. The sensor part has an integrated structure made of ceramic, providing excellent reproducibility and stability, allowing for accurate measurement of pressure in low to medium vacuum ranges regardless of the type of gas (absolute pressure gauge). 【Features】 ○ Long-term stability ○ Excellent corrosion resistance due to the use of a ceramic membrane ○ Built-in temperature compensation circuit ○ Newly adopted structure to protect the sensor from dirt ○ Zero point adjustment possible with a push button For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Adoption of ceramic sensor → Excellent corrosion resistance → Long-term stability → Significant reduction in time to stabilize after atmospheric input ○ Capable of absolute pressure measurement → Capable of total pressure measurement independent of gas type ○ Reduced warm-up time → Significant reduction in time to stabilize after power is turned on ○ Temperature compensation → Built-in temperature compensation circuit type ○ Protection function → Newly adopted structure to protect the sensor from dirt ○ Easy zero adjustment → Zero adjustment possible with a push button ○ Measurement value output signal → Accurate linear output (DC 0 to 10V) ○ Power supply voltage → Wide input power supply voltage range adopted (DC 14 to 30V) ○ Compact and lightweight sensor → Compact size with a mass of 329g (pipe end specification) ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Pressure monitoring for vacuum furnaces such as vacuum dissolution and vacuum heat treatment ○ Pressure monitoring during the process of film deposition equipment ○ Pressure vacuum systems such as pressurized reduction furnaces ○ Pressure monitoring for gas replacement, gas sealing, etc. ○ Pressure monitoring for various manufacturing equipment such as solar cells ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.