Breaking the common sense of double-sided grinding machines, achieving ultra-thin processing with high precision and high quality in parallelism and flatness.
Unlike conventional double-sided processing machines, the drive for the upper and lower platens adopts an independent drive system, allowing the upper platen to always remain level and move up and down via a gyro mechanism. Additionally, this is the flatness data for polished synthetic quartz glass with a diameter of φ140x6t. The flatness achieves a PV value of 50nm.
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basic information
【Features】 - Adopts a 4-axis independent servo drive control to reduce vibrations during processing of the upper and lower plates. - Sets the suspension position of the upper plate at the point of contact with the lower plate surface, maintaining parallelism between the plates without any tilt during the rotation of the upper plate. - Provides ribs on the sub-plate above the upper plate to prevent curvature of the upper plate. - Positions the mounting of the upper plate on the outer side of the center of gravity of the plate to suppress curvature of the upper plate. ● For other functions and details, please contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Application】 ○ Ideal for precision processing of parallel plane surfaces such as semiconductor materials, glass substrates for photomasks, optical glass substrates, and thin substrates. ● For other functions and details, please contact us.
Company information
Our company was founded with the purpose of "creating grinding equipment that utilizes the troubles and know-how known only to those who make." We have focused on "demonstrating what can be achieved with that equipment (contract processing)." To make effective use of our equipment, we also offer technical guidance upon request. We will continue our efforts to solve the common troubles known among those who polish, and we kindly ask for your continued support.