Integrating sphere for measuring total luminous flux of LEDs and others, compatible with diameters up to 3 meters.
The SLM series all-light-integrating spheres can accommodate sizes up to a diameter of 3 meters.
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basic information
【Full Beam System Configuration】 ■ Integrating Sphere: 6 to 125 inches (150 to 3000 nm) ■ Standard light source with NIST traceability ■ Self-absorption correction light source ■ Stabilized power supply for standard light source ■ Sample mount stage (please consult for temperature-controlled stage) ■ High-resolution, high-sensitivity spectrometer from Carl Zeiss, Solid Lambda CCD ■ Quartz optical fiber ■ Power supply for sample light source (can be omitted if compatible with standard light source power supply) □ For other functions and details, please refer to the catalog.
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Mainly utilizing optical measurement, devices for various non-destructive, non-contact measurements and semiconductor manufacturing process inspections (such as film thickness measurement and plasma monitoring) are developed for both online and offline use.