It has excellent thermal conductivity, high electrical insulation properties, and a thermal expansion rate close to that of silicon (Si), making it a material of interest for high thermal conductivity applications.
Aluminum nitride is used in heaters, electrostatic chucks, susceptors, clamp rings, cover plates, and other components for semiconductor manufacturing equipment, taking advantage of its high thermal conductivity and high corrosion resistance. It is also used in parts for medical devices such as MRI machines. MARUWA has established a consistent system from research and development to material production and machining, based on the material technology cultivated over many years. Through unique hot pressing methods and various machining processes, it is possible to meet the cutting-edge technical demands in semiconductor manufacturing equipment and medical applications.
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basic information
【Features】 - Excellent thermal conductivity comparable to aluminum metal - Thermal expansion rate close to silicon - High electrical insulation properties - Plasma resistance against fluorine-based gases and others - Dense sintered body without voids that could become defects - Material selection according to purpose (high thermal conductivity type / high purity type) - Sizes compatible with semiconductor manufacturing equipment 【Recommended Sizes】 φ180–380mm × 1–10mm (with plans to support φ550 in the future) *Custom sizes are also available beyond the above. ● For more details, please refer to the catalog or contact us.
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Applications/Examples of results
[Applications] - Parts for semiconductor manufacturing equipment (heaters, electrostatic chucks, susceptors, clamp rings, cover plates) - Parts for medical devices
Company information
The name MARUWA carries the meaning of "everyone coming together in harmony." The logo of MARUWA uses blue, which is said to represent hope, and expresses the "harmony, connections, and bonds between people," which is also the origin of the company name. Our company values people. We believe that a company can only achieve sustainable growth and development by valuing and utilizing the strengths and individuality of each person. It is unacceptable to suppress or distort these qualities for the sake of the company. We hope that our growth and development will contribute to the happiness of not only our employees but also the local community and many others, and we are committed to our daily business activities with all our efforts. In recent years, the importance of preserving the natural environment on this planet we live on has been emphasized from various perspectives. We feel very fortunate that the opportunities for our ceramic products to be used for environmental conservation are increasing, and the demands and expectations for new products in this regard are becoming stronger.