Development of environmentally friendly new products
CVD yttria is a high-purity, transparent protective film with excellent plasma resistance.
Inquire About This Product
basic information
【Features】 ○ Covers the equipment surface with a yttria film that has excellent plasma resistance ○ Forms a dense yttria film with high adhesion using the CVD method ○ Impurity content in the yttria film is equivalent to that of fused quartz glass ○ Compatible with 300mm parts ● For more details, please contact us or refer to the catalog.
Price information
Please feel free to contact us.
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
For more details, please contact us.
catalog（1）
Download All Catalogs
Company information
Quartz glass supporting cutting-edge semiconductor, LCD, and optical fields. Our company utilizes unique technological know-how in quartz glass processing to meet all needs, from large-scale processed products to precision processed products. We also perform cleaning of ceramics and silicon metals. Techno Quartz will contribute to the further development of cutting-edge technology through high-quality quartz glass products.