Create materials and someday create.
We offer a lineup of electrostatic chucks that utilize various material technologies to meet user needs. We provide products tailored to applications such as plasma environments, electron beam usage, and ultra-low expansion specifications, from the development and prototyping stages.
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basic information
【Features】 ○ Zero thermal expansion type ESC ・High precision flatness <100nm (8 inches) ・Compatible with pore-free processing ・High specific rigidity ・Non-magnetic ○ Built-in Heater type ESC ・Johnsen-Rahbeck type ・Compatible with 8 and 12 inches ・Electrode pattern can be selected as single pole or double pole ・Excellent in-plane temperature uniformity due to built-in planar heating element ○ Spray coat type ESC ・Low impedance Realization of high thermal transfer (heat passage) module ・Realization of large size using MMC substrate Reliable electrostatic chucks can be manufactured by thermal expansion matching with thermal spray coatings ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
- Plasma environment heater-integrated electrostatic chuck - Non-magnetic electrostatic chuck for electron beam environments - Ceramic-coated electrostatic chuck for large special glass substrates
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Company information
NTK Ceratec is a manufacturer that develops its business centered around ceramics. With the slogan "Enjoying creativity and challenges with ceramics," we listen to the needs of each individual user, strive to solve their problems, and aim to be of assistance. In cutting-edge fields of the era, including semiconductor and LCD manufacturing, as well as electronic devices, we pursue total solutions through engineering and electronics ceramics, constantly developing and providing innovative technologies and materials. As a good corporate citizen, we aim to be a company loved by our customers, the local community, and everyone involved with us, contributing to society.