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  6. CVD process gas analysis device MPQMS

CVD process gas analysis device MPQMS

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last updated:Feb 13, 2020

マイクロフェーズ
マイクロフェーズ
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It is a quadrupole mass spectrometry system that can analyze the gas components of the CVD process on-site.

Our various nano-carbon manufacturing equipment and biomass carbonization devices are designed to be integrated and used as is. They are equipped with an exhaust system and can handle high-pressure CVD conditions.

    Analytical Equipment and Devices
screenshot.39.jpg

CVD process gas analysis device MPQMS

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【Features】 ○ Forty extreme mass spectrometer ○ High vacuum system for differential pumping ○ Computer for data extraction management

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マイクロフェーズ

マイクロフェーズ

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In the fields of carbon nanotubes, nanomaterials, and nanotechnology, we are continuously advancing our research and development to keep pace with changing market needs and to aim for the forefront of technology. Additionally, we are making ongoing efforts to acquire a wide range of knowledge and capabilities to meet the diverse needs of the market. We always strive to fully understand our customers' objectives and requests, and to proactively propose the shortest path to achieving their goals. We are committed not only to utilizing the strengths we have accumulated but also to gaining new insights and capabilities through challenges as we engage in our work. The advancements in nanotechnology have led to numerous innovations. The wonders and allure of the nanoscale still hold many deep mysteries. We also wish to contribute to the progress of nanotechnology and the creation of innovations.

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