Equipped with a full-wing rotating wing, suitable for ultra-high vacuum. For electron microscope inspection and semiconductor applications.
The "Magnetic Levitation Turbo Molecular Pump STP-451" is designed for electron microscope inspection and semiconductor applications. It achieves industry-leading performance and maximum process flexibility! It is adopted by major equipment manufacturers in the scientific instruments, semiconductor, and magnetic media industries, and is recognized for its high reliability. For more details, please download the catalog or contact us.
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**Features** ○ Advanced rotor technology → High process flexibility → Oil-free → Low vibration → High reliability → Long-term maintenance-free ○ Advanced control unit → Auto-tuning → Self-diagnosis function → DC motor drive → Operates without a battery ○ Compact design → Space-saving installation → Half-rack control unit For more details, please download the catalog or contact us.
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For more details, please contact us.
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Applications/Examples of results
【Applications】 ○ Electron microscope ○ Surface analysis equipment ○ Mass spectrometer ○ Accelerator ○ Nuclear fusion experimental device ○ Semiconductor manufacturing equipment (ion implantation, dry etching, MBE)
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