Vacuum measurement device Micro Hakumaku pressure sensor

This is the world's first vacuum gauge that can dynamically measure pressure in a vacuum environment. It can also achieve pressure distribution measurement in a vacuum environment with multiple installations.

Vacuum technology is required in many industries, and various production equipment is used. The environment within these production facilities varies greatly, ranging from atmospheric pressure to 10^-5 Pa, and most production equipment consists of a series of continuous processes with different processing environments. Therefore, it is crucial to dynamically measure and understand the pressure distribution and gas flow near each process and product, as these factors influence product quality and productivity. However, due to constraints such as the size of vacuum gauges, measurements cannot be taken at the desired points and can only be installed near the outer walls of the equipment, resulting in "indirect" measurements. Consequently, the environmental conditions of the equipment are derived from simulations and other results. With micro-hakumaku pressure sensors, which are ultra-compact and robust, it becomes possible to install them within the equipment environment, allowing measurements in areas that were previously inaccessible, thus visualizing previously unseen conditions. This leads to improvements and monitoring of the optimal equipment environment, achieving low carbon emissions (reduction of environmental impact) through enhanced product quality and increased yield.

Vacuum EquipmentPressurePressure Control