This is the world's first vacuum gauge that can dynamically measure pressure in a vacuum environment. It can also achieve pressure distribution measurement in a vacuum environment with multiple installations.
Vacuum technology is required in many industries, and various production equipment is used. The environment within these production facilities varies greatly, ranging from atmospheric pressure to 10^-5 Pa, and most production equipment consists of a series of continuous processes with different processing environments. Therefore, it is crucial to dynamically measure and understand the pressure distribution and gas flow near each process and product, as these factors influence product quality and productivity. However, due to constraints such as the size of vacuum gauges, measurements cannot be taken at the desired points and can only be installed near the outer walls of the equipment, resulting in "indirect" measurements. Consequently, the environmental conditions of the equipment are derived from simulations and other results. With micro-hakumaku pressure sensors, which are ultra-compact and robust, it becomes possible to install them within the equipment environment, allowing measurements in areas that were previously inaccessible, thus visualizing previously unseen conditions. This leads to improvements and monitoring of the optimal equipment environment, achieving low carbon emissions (reduction of environmental impact) through enhanced product quality and increased yield.
Inquire About This Product
basic information
The micro-hakumaku pressure sensor is a newly developed sensor that features a thin film sensing element made from newly developed materials, a heat-resistant polyimide film substrate with a small heat capacity, and an optimal design for the thin film section, allowing for ultra-compact, robust performance that can cover a wide pressure range. ● It can be installed in a vacuum environment. ● Multiple installations allow for pressure distribution measurement. ● It can measure a wide range, from 0.005 Pa to atmospheric pressure. ● It has a fast response time of 100 ms. ● A system can be constructed with up to 32 channels. ● It has excellent vibration and environmental resistance. ● Measurement software is also available.
Price information
The price varies depending on the quantity, so please feel free to contact us.
Delivery Time
※The delivery time varies depending on the quantity, so please feel free to contact us.
Applications/Examples of results
It can be installed at any location within the vacuum device for pinpoint pressure measurement. Additionally, multiple installations allow for pressure distribution measurement. Example 1: Installed before and after the object in a vacuum deposition device Example 2: Installed near the object in a sputtering device Example 3: Installed near the mold in a vacuum forming device Example 4: Multiple installations within a vacuum chamber
catalog（5）
Download All Catalogs
Company information
Since our founding, we have been dedicated to vacuum measurement and environmental measurement as a measuring instrument manufacturer. Leveraging this extensive experience, we believe that pursuing technological capabilities, as well as providing speedy and more flexible responses to our customers, are our most important challenges.