A multi-component concentration type characterized by a compact cell-type transmitter for semiconductor manufacturing processes. This is a concept model that emphasizes measurement concentration stability.
The FUD-1 Model-53 retains its advantages such as maintainability and high-precision inline measurement, while being designed as a compact cell-type transmitter for semiconductor manufacturing processes. It is also a concept model that emphasizes measurement concentration stability. This device not only measures the sound velocity and temperature of single-component concentrations but also simultaneously measures other physical quantities (such as conductivity). By doing so, it calculates and outputs the concentrations of two components out of three from the calibration curve recorded in the built-in data ROM. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Real-time measurement of the concentration of two components out of three possible components ○ Standard equipped with analog DC 4-20 mA (two channels) and digital RS232C ○ Standard equipped with measurement error output and alarm output ○ Standard equipped with self-diagnosis function and error message display ○ Compact and lightweight cell-type transmitter can be directly installed on the line ○ Liquid contact materials made of PFA, designed for low output, have no impact on chemical solutions ○ Capable of high-precision continuous measurement ○ Maintenance-free with no need for regular adjustments or calibrations ○ Easy installation with no need for various adjustments during setup ○ Easy feedback to the process through real-time output ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
【Applications】 ○ Management of CMP slurry and oxidant concentration in the CMP process, etc. ○ Management of cleaning solution concentration in the cleaning process, etc. (HF+HNO3, HF+H2SiF6, etc.) ○ Management of etching solution concentration in the etching process, etc. (TMAH+resist, TMAH+Si, etc.) ● For more details, please contact us or refer to the catalog.
catalog（1）
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Company information
Since our establishment in 1976, we have developed products specialized in ultrasonic application technology and have brought them to the world. Although ultrasonic technology may be unfamiliar to many, we believe there are still many unknown aspects, and its range of applications is limitless. Our corporate philosophy is to "create value through ultrasonic technology and share that value with our customers." We are committed to delivering high-value-added products to our customers in a timely manner, contributing to their satisfaction and joy. We appreciate your continued support.
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