This is a high-precision positioning stage that uses SPPA actuators. It can achieve a long stroke of up to 100mm with micro-feeding in units of 20nm.
The "Ultrasonic Motor Stage" is a high-precision positioning stage capable of micro-feeding movements in nanometer units up to a maximum of 100mm. It operates with a dedicated controller and closed-loop control using an internal linear scale. It is ideal for optical experiments and analytical measurement instruments that require high positioning reproducibility. It features lower heat generation and magnetic fields compared to electromagnetic motor types, making it suitable for special environments such as vacuum and non-magnetic conditions. We offer a lineup that includes "X-axis stages," "XY-axis stages," and "rotary stages." For more details, please download the catalog or contact us.
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basic information
**Features** - Long-range scanning up to 100mm → Equipped with a compact, high-precision SPPA actuator driven by a piezoelectric element, it comes standard with strokes of 15mm and 35mm, and can accommodate up to 100mm. → It ensures a sufficient movement speed of 10mm/sec for normal observation and mapping measurements, allowing for scanning of a wide area along the guide mechanism. - High resolution with 20nm steps → With a built-in linear scale and closed-loop control, it enables reproducible positioning with high resolution of 20nm across the entire scanning range. → For sample scanning intended for observation with microscopes or CCD cameras, it can also operate as an open loop without a sensor. - Easy control via RS232C → It features an RS232C control interface, allowing immediate operation when connected to a PC. → By simply sending the specified movement amount with a movement command, it executes high-precision positioning to the desired location. → The stage's status can be monitored by reading the status and alarms. ● For more details, please download the catalog or contact us.
Price information
For more details, please contact us.
Delivery Time
※Estimated delivery time: Approximately 1 to 1.5 months.
Applications/Examples of results
【Applications】 ○ Microscope sample table ○ SEM/TEM sample table ○ Analytical instrument sample table ○ Wafer mapping measurement ○ Prober stage ○ High-precision alignment ○ High-precision positioning of optical components For further details, please contact us.
Line up（5）
| Model number | overview |
|---|---|
| TS1L80-015A | <X-axis stage> Stroke: 15mm, Resolution: 20nm |
| TS1L120-035A | <X-axis stage> Stroke: 35mm, Resolution: 20nm |
| TS2L180-015A | <XY-axis stage> Stroke: 15mm, Resolution: 20nm |
| TS1R150-360A | <Rotary stage> Rotation angle: 360°, Resolution: 1 |
| TC1300A | Controller dedicated to ultrasonic motor stage |
catalog（1）
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Company information
Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.