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  6. [Piezostage] PT Tilt and Rotation Type Tilt Stage

[Piezostage] PT Tilt and Rotation Type Tilt Stage

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Piezo stage PT tilt and rotation type

last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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This is a type of stage with a sloped table surface. There are two types with different slope directions.

The piezo stage PT tilt and rotation type allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt quickly and accurately. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, linear motion is also possible through simultaneous control of multiple axes. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple design of the components allows for a compact main body, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometer types with a virtual rotation center, and even planar skew types with a three-point support structure. *For more details, please download the materials or feel free to contact us.

    Other machine elements
nano_tilt.JPG

[Piezostage] PT Tilt and Rotation Type Tilt Stage

nano_tilt.JPG
nano_tilt.JPG
  • Related Link - https://www.thkprecision.co.jp/product/piezo/45

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basic information

【Features】 ○ Various angle adjustments possible ○ High-speed, high-precision scanning operation ○ Compact and easy to integrate into devices 【Specifications】*There are two types with different tilt orientations ○ PT1T60-500S → Stroke: 500nm → Resolution: 0.01nm → Repeatability: ±0.01nm → Resonant frequency: 1700Hz → Main body size: 60×60×30mm ○ PT1T38-1000S → Stroke: 1000nm → Resolution: 0.02nm → Repeatability: ±0.02nm → Resonant frequency: 1090Hz → Main body size: 85×38×32mm *For more details, please download the materials or feel free to contact us.

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Applications/Examples of results

【Examples of Use】 Laser beam axis adjustment Precision parallel surface alignment Micro-angle adjustment of optical devices Tilt adjustment Cavity length adjustment *For more details, please download the materials or feel free to contact us.

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Piezo Stage PT Tilt/Rotation Type Catalog

Piezo Stage PT Tilt/Rotation Type Catalog

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THKプレシジョン

THKプレシジョン

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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