This product is compatible with vacuum applications and can be delivered with cleanroom specifications.
The lifting stage is compatible with vacuum conditions. It can also be delivered in a clean room specification. The stroke is 16mm, the positioning accuracy is 2μm, and the vertical force/replacement ratio is 1:3. Additionally, the straightness/flatness is ±2μm, the maximum feed speed is 20mm/s, the maximum acceleration is 200mm/s squared, the maximum load is Z: 30N, and the weight is 4.5kg. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Vacuum compatible ○ Clean room specification delivery available 【Performance Specifications】 ○ Stroke: 16mm ○ Positioning accuracy: 2μm ○ Vertical force/replacement ratio: 1:3 ○ Straightness/flatness: ±2μm ○ Maximum feed speed: 20mm/s ○ Maximum acceleration: 200mm/s² ○ Maximum load: Z: 30N ○ Weight: 4.5kg ○ Motor: Linear motor (no magnetic field) ○ Casing: Warp prevention, oxidation film treatment ● For more details, please contact us or refer to the catalog.
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Company information
Shoei System Co., Ltd. operates under the motto of "continuously providing what is necessary for society and aiming for sustained growth together with our customers," specializing in the design and sales of low-cost, optimal servo systems. If you have any issues with applications using precision devices, please feel free to consult with Shoei System! We would like to use all our capabilities to assist you as much as possible.