This is a comprehensive catalog featuring a wide range of products, including semiconductor transport robots and aligners.
In the comprehensive product catalog of JEL, we feature a variety of transport robot products, including cylindrical coordinate clean robots, horizontal multi-joint clean robots, and cylindrical coordinate vacuum-compatible clean robots. The 3-axis cylindrical coordinate clean robot "SCR3000CS" is designed for super clean rooms and is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout, and it is equipped with an operation monitor. The 4-axis horizontal multi-joint clean robot "GCR4000-PM" is a multi-axis type for super clean rooms. It is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300 mm wafers, using two-phase stepping motors with absolute encoders on all axes. S-curve acceleration and deceleration control, along with motion trajectory optimization, enable high-speed and high-precision wafer transport. For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Published Content】 ○ 3-axis cylindrical coordinate clean robot ○ 4-axis cylindrical coordinate clean robot ○ 3-axis cylindrical coordinate clean robot (for small diameter wafers) ○ 2-axis cylindrical coordinate clean robot (for small diameter wafers) ○ 3-axis cylindrical coordinate clean robot (for small diameter wafers) ○ 3-axis cylindrical waterproof clean robot ○ 4-axis cylindrical waterproof clean robot ○ 4-axis horizontal multi-joint clean robot ○ 5-axis horizontal multi-joint clean robot ○ 3-axis cylindrical coordinate vacuum-compatible clean robot ○ 4-axis cylindrical coordinate vacuum-compatible clean robot ○ 4-axis cylindrical coordinate link-type vacuum-compatible clean robot ○ 5-axis horizontal multi-joint vacuum-compatible clean robot ○ Various optical aligners ○ 300mm compatible edge grip aligner ○ 342mm suscepta compatible vacuum aligner ○ Sorter system ● For more details, please contact us or download the catalog.
Price information
-
Delivery Time
Applications/Examples of results
【Purpose】 ○ For use as a semiconductor wafer transport robot and a glass substrate transport robot for LCDs. ● For more details, please contact us.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."