It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.
The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Arm variations: 100mm, 130mm, 160mm, 200mm ○ Z-axis variations: 200mm, 300mm, 400mm, 500mm ○ Load capacity: 3kgf or less based on the third joint of the arm ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to the device layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use two-phase pulse motors ○ High-speed, high-precision transport of wafers through S-curve acceleration and deceleration control ○ Wafer holding: Vacuum suction, drop-in, edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Optimal chucking solutions available according to the transported items and device layout ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."