The exchange of wafers can be done in a short time with two arms.
The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Arm variations: 100mm, 130mm, 160mm, 200mm ○ Z-axis variations: 200mm, 300mm, 400mm, 500mm ○ Load capacity: Equivalent to 3kgf or less at the third joint of the arm ○ Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines ○ Twin arm design reduces wafer exchange time ○ Base type and flange type can be selected according to equipment layout ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use 2-phase stepper motors ○ S-curve acceleration and deceleration control enables high-speed, high-precision wafer transport ○ Wafer holding: Vacuum suction, drop-in, edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."