Suitable for small wafer transport, allowing for a compact device layout.
The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ The SSCR2090S-PM is compatible with units and can be modified to link arm specifications or Z-less specifications. ○ Load capacity: 0.2 kgf or less (workpiece only) when converted to the third joint of the arm. ○ Equipped with operation monitoring. ○ Control method: RS232C and parallel photo I/O. ○ All axes use 2-phase stepping motors. ○ High-speed and high-precision transport of wafers is achieved through S-curve acceleration and deceleration control. ○ Wafer holding: vacuum suction. ○ Chuck materials can be customized to various options including CFRP, aluminum, and ceramics. ○ Can accommodate optimal chucks tailored to the transported items and equipment layout. ● For more details, please contact us or refer to the catalog.
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