It is possible to choose between base type and flange type according to the device layout.
The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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【Features】 ○ Arm variations: 100mm, 130mm, 158mm, 173mm, 203mm ○ Z-axis variations: 200mm, 300mm ○ Load capacity: 3kgf or less based on the third joint of the arm ○ Cleanroom compatible: Equipped with a 0.01μm mesh filter for vacuum lines ○ Base type and flange type can be selected according to the device layout ○ Operating monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use two-phase stepper motors ○ High-speed and high-precision wafer transport through S-curve acceleration and deceleration control ○ Wafer holding: Vacuum suction, drop-in, edge grip chuck ○ Chuck materials can be various, including CFRP, aluminum, ceramics, etc. ○ Optimal chucking available according to the transported object and device layout ● For more details, please contact us or refer to the catalog.
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