It is suitable for wafer transport and allows for quick wafer exchange.
The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
**Features** - Arm variations: 95mm, 156mm - Z-axis variations: 200mm, 300mm - Load capacity: 3kgf or less based on the third joint of the arm - Cleanroom compatible: Equipped with a 0.01μm mesh filter for vacuum lines - Twin-arm design reduces wafer exchange time - Base type and flange type can be selected according to equipment layout - Operating monitor equipped - Control method: RS232C and parallel photo I/O - All axes use two-phase pulse motors - S-curve acceleration and deceleration control enables high-speed, high-precision wafer transport - Wafer holding: vacuum suction, drop-in, edge grip chuck - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Optimal chucking solutions available based on the transported items and equipment layout For more details, please contact us or refer to the catalog.
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