Maintains long lifespan and high reliability in transportation, suitable for use in low outgassing environments.
The 4-axis cylindrical coordinate link-type high vacuum compatible clean robot DTVHR4000 series features a link structure that is connected by rolling elements without using metal belts or gears, ensuring long life and high reliability in transportation, with low outgassing and usability in environments ranging from 20°C to 50°C. It has obtained CE certification. For more details, please contact us or refer to the catalog.
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basic information
**Features** - Arm variation: 275mm - Z-axis variation: 50mm - Excellent straightness and low particle generation achieved through link-type adoption - Vacuum seal: uses magnetic fluid seal and bellows - Twin arm adoption reduces wafer exchange time - Operating environment: can be used in an inert gas atmosphere at temperatures below 50 degrees Celsius - Equipped with operation monitor - Control method: RS232C and parallel photo I/O - All axes use 2-phase stepper motors - High-speed, high-precision wafer transport through S-curve acceleration and deceleration control - Compatible with optimal chucks tailored to the transported items and equipment layout For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."