It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.
The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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**Features** - Arm variations: 400mm, 500mm - Z-axis variations: 400mm, 500mm, 600mm, 760mm, 900mm - Load capacity: 15kgf or less at the third joint (400mm, 500mm) - Cleanroom compatible: Equipped with a 0.1μm mesh filter for vacuum lines - Adoption of twin arms reduces substrate replacement time - Base type and flange type can be selected according to device layout - Equipped with operation monitor - Control method: RS232C and parallel photo I/O - All axes use AC servo motors - High-speed and high-precision transport of glass substrates through S-curve acceleration and deceleration control - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Various sensors can be mounted on the hand section → Alignment, presence/absence, mapping, etc. - Optimal chucking compatible with the transported items and device layout For more details, please contact us or refer to the catalog.
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