Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.
The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
**Features** - Arm variations: 550mm, 750mm, 800mm, 820mm - Z-axis variations: 95mm, 105mm, 335mm - Load capacity: → Up to 30kgf at the third joint (550mm, 750mm, 820mm) → Up to 40kgf at the third joint (800mm) - Excellent straightness and low particle generation achieved through link-type design - Reduced substrate replacement time due to twin arm design - Equipped with motion monitor - Control method: RS232C and parallel photo I/O - All axes use AC servo motors - High-speed, high-precision transport of glass substrates achieved through S-curve acceleration and deceleration control - Chuck materials can accommodate various options such as CFRP, aluminum, and ceramics - Can provide optimal chucks tailored to the transported items and equipment layout For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."