【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.
This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.
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basic information
- Achieves a thin and lightweight design while incorporating a 5-phase stepping motor, coupling, ball screw, and linear encoder. - High-precision repeat positioning is possible with full closed-loop control. - Table size: 60mm x 60mm - Table movement: 20mm - Compatible vacuum level: 10^-4 Pa - Load capacity: 49N - Minimum resolution: 1nm - Maximum movement speed: 2mm/sec - Compatible controller: FC-911 For other functions and details, please contact us or refer to the catalog.
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Delivery Time
※The delivery date may vary depending on the quantity, so please feel free to contact us.
Applications/Examples of results
X-ray utilization technology (such as focusing of synchrotron light) Semiconductor-related (such as stitching of drawing areas) It is used in various advanced research.
catalog（1）
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CAD data（1）
| Model number | overview | File |
|---|---|---|
| DWG-DXF_FS-1020UPX(V) | This is a complete set of drawings for the vacuum-compatible 1nm resolution stage FS-1020UPX(V). We have 2D files available in "DXF" and "DWG" formats. |
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.