Thin film products for electronics manufactured using various process technologies.
At Equa, we offer products that feature multilayer patterns formed by various metal films on glass substrates and silicon wafers. We propose optimal processes utilizing our unique shape data generation technology, high-precision mask drawing equipment, semiconductor steppers, and cutting-edge processing techniques such as photo-etching, lift-off, plating, and sandblasting. Additionally, we enable ultra-high precision processing by directly patterning on substrates using photomask manufacturing equipment. We form electronic circuits using diverse metal thin films such as chromium, aluminum, titanium, and ITO on glass, ceramics, and silicon substrates. 【Processing Technologies】 - Photo-etching - Lift-off - Wiring patterns on SI wafers - Probe patterns on PI films - Through wiring patterns on glass For more details, please contact us or download our catalog.
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【Features】 ○ Provides products that form multilayer patterns with various metal films on various glass substrates and silicon wafers. ○ Proposes optimal processes using cutting-edge processing technology. ○ Enables ultra-high precision processing by directly patterning on substrates using photomask manufacturing equipment. ○ Forms electronic circuits using diverse metal thin films such as chromium, aluminum, Ti, and ITO on glass, ceramics, and silicon substrates. [Photo Etching] ○ Initially, metals and other materials required are deposited to a specified thickness on the substrate using methods such as sputtering and vapor deposition, followed by coating with photoresist. ○ The exposure and development process of the resist is performed using a photomask and exposure equipment, and the desired pattern shape is formed through etching. [Lift-Off] ○ Using photo etching technology, a pattern that is the inverse of the final shape is formed with other metal films and resist images. ○ Metal deposition is performed on the final pattern formation area using sputtering or vapor deposition equipment. ● For more details, please contact us or download the catalog.
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Equa Corporation Product Introduction
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Equa Corporation's thin film products are created based on high-precision drawing equipment, advanced thin film formation technology, and glass processing technology. We accommodate small lots of fine photolithography products such as photomasks for steppers, photomasks for aligners, other general-purpose masks, encoders, focus plates, and resolution charts.