0.1μm, chemical solution management, compatible with hydrofluoric acid, inline particle sensor
Sensors for inline multi-point monitoring systems that correspond to 0.1μm particle management, chemical management, and hydrofluoric acid in the wet cleaning line of pharmaceutical supply plants. Proven track record in semiconductor factories and chemical manufacturing plants.
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basic information
● Particle size classification (5 stages) 0.1μm, 0.15μm, 0.2μm, 0.3μm, 0.5μm and above ● Direct connection to the supply line for quick detection of process abnormalities ● Control and result display at the measurement site possible in combination with sensor controller (KZ-70) and monitoring software ● Compatible with multi-point monitoring systems (20 points with RP Monitor K9461 Ver. 3, 160 points with multi-point monitoring software KF-02B)
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Applications/Examples of results
Semiconductor factory chemical plant supply line Chemical manufacturing company production line Pure water production plant supply
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Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.