Demonstrating power in clean control of special gas supply systems, measuring from 0.1μm.
Inline measurement of semiconductor special material gases is possible. Domestic manufacturing and domestic maintenance by trusted Rion instruments.
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basic information
● Simultaneous measurement of 5 particle sizes: 0.1 μm, 0.15 μm, 0.2 μm, 0.3 μm, and 0.5 μm or larger ● Rated flow rate of 100 mL/min, maximum 300 mL/min ● Direct measurement of inert gases, corrosive gases, reactive gases, etc. is possible ● Achieves leak-tight, outgas-free, and dead space-free performance ● Compatible with SiH4, SiHCl3, HBr, NH3, PH3, HCl, and others
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Semiconductor factory gas supply line Gas manufacturing plant
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A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.