Particles in photoresist solution and SOG can be measured from 0.1 μm.
High counting efficiency 0 Measurement of particle count in 0.1μm photoresist solution and SOG Robust support system with domestic manufacturing and maintenance!
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basic information
●Measurement particle size range: 0.1 μm to 0.5 μm (simultaneous measurement in 10 stages)
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Applications/Examples of results
Semiconductor manufacturer photolithography process Photoresist manufacturing company shipping inspection Mask manufacturing company, etc.
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Air and Liquid Particle Counter Rion Comprehensive Catalog
Company information
A group of acoustic measuring instruments such as sound level meters and vibration meters, particle counters essential for cleanliness management, seismic measurement systems including earthquake meters for disaster prevention and control, and further expanding product fields centered on welfare and environmental issues, contribute to the enhancement of social welfare, safe living, and technological innovation through a long accumulation of technology and continuous challenges to new technologies.