High precision, high purity, high durability. Precision electrochemical polishing that meets the quality standards of semiconductor manufacturing.
The precision electrochemical polishing of Toyo Rika Co., Ltd. is a high-precision metal surface treatment technology that simultaneously achieves high smoothness with a surface roughness of Ra = 0.02μm or less and excellent corrosion resistance due to a Cr-rich layer. It realizes uniform smoothness and cleanliness that cannot be obtained through cutting processes, making it particularly suitable for stainless steel fluid components and precision mechanical parts. This technology removes fine irregularities at the nano level without applying processing stress, thereby enhancing aesthetics and functionality while avoiding deformation and processing scratches. Furthermore, it can accommodate thin tubes, inner surfaces, and complex-shaped parts that are difficult to polish with buffing, providing a highly uniform finish. The application fields are diverse, including gas supply system components and chamber parts for semiconductor manufacturing equipment, medical devices, food manufacturing machinery, analytical instruments, and scientific equipment, boasting many achievements in environments where cleanliness, durability, and reliability are required. Our company designs optimal processing conditions according to shape and application, and also supports process management, quality control, and traceability. We provide precision electrochemical polishing with stable quality from small lots to mass production.
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Target materials: SUS304, SUS316, SUS316L, and other stainless steel materials Supported shapes: Complex shapes with an inner diameter of less than φ1mm are possible. Finished surface roughness (Ra): Ra0.02μm (may vary depending on shape and material) Corrosion-resistant upper layer: Cr-rich layer (high chromium concentration oxide film) Examples of applicable uses: Semiconductor manufacturing equipment parts, medical device parts, analytical instruments, food machinery, etc. Classification of processing target applications: Flow paths, cleaning tanks, valve parts, liquid contact parts, inner surfaces of vacuum chambers, etc. Processing equipment environment: Dedicated electrolytic equipment, clean-compatible processes, and process management systems are in place. Inspection and quality assurance system: Capable of surface roughness measurement, dimensional measurement, particle verification, photographic records, etc. Traceability: Available (lot number, processing date, work records, etc.) Minimum lot / mass production support: Capable of handling from 1 prototype to large-scale production, regardless of size. Other options: Vacuum packaging, clean shipping, identification marking, inspection certificate attachment, etc.
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【Target Industries】 Semiconductor manufacturing / Medical devices / Food manufacturing / Analytical instruments / Research and development / Precision machinery, etc. 【Product/Part Names】 Gas flow path components, vacuum chambers, injector parts, cleaning tanks, liquid-contact piping, flanges, SUS nozzles, etc. 【Processing Target Areas】 Inner surfaces only / Both inner and outer surfaces / Inside thin tubes / Areas around welds, etc., flexible response to any application 【Processing Objectives】 Smooth finishing with Ra 0.02μm or less, improved cleanliness, buff-free processing, enhanced corrosion resistance, reduced outgassing, improved appearance, etc. 【Past Achievements】 Experience supplying to major semiconductor equipment manufacturers / OEM supply for medical devices / Joint research with XX University / Adoption for ISO class compliant parts, etc. 【Lot Size and Frequency】 Capable of handling from single prototypes to mass production, regardless of size 【Remarks and Special Notes】 Desire for clean room shipment, inspection certificate attachment, dimensional change restrictions, under consideration for comparison with other treatments, etc.
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Company information
Toyohashi Chemical Co., Ltd. is a comprehensive technology company that consistently responds to a wide range of needs, from contract processing to the manufacturing of surface treatment agents and processing equipment, the development of automatic inspection devices, and even technical consulting, as a leading company in metal surface treatment. We have established a consistent production system utilizing precise electro-polishing and cleaning technologies, vacuum packaging and assembly in clean rooms, and advanced processing techniques. We have gained high trust in fields where quality is essential, such as semiconductors, medical devices, and food-related equipment. As a partner that responds to all surface treatment challenges with technology and flexible adaptability, we continue to support our customers' manufacturing endeavors.