Application of mini CORI-FLOW (Pump System Case 1)
Application of mini CORI-FLOW (Pump System Case 1)
[Pump System Case 1] Gas or Liquid Precursor Delivery
In the vapor deposition process, various precursor fluids (whether gas or liquid) must be precisely controlled. The "mini CORI-FLOW(R) series high-precision mass flow controllers" are particularly well-suited for these demanding applications. Thanks to the "multi-range" feature, OEM customers do not need to maintain a large number of different instruments. This device allows for easy range changes, thereby providing a cost of ownership advantage. [Application Examples] - Applying mini CORI-FLOW(R) to additive dosing → Enables the easy construction of a compact and autonomous system. - Applying mini CORI-FLOW(R) to batch counters → Provides a high-precision, high-speed, highly repeatable, and compact batch and dosing system. For more details, please contact us or download the catalog.
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【Application Examples】 [Application to Additive Distribution] - The master flow meter connected to the FLOW-BUS (Broncost's field bus) measures the main fluid. - The slave instrument, preset to follow the master at a certain ratio, is also connected to the FLOW-BUS. - When the main fluid changes, the slave instrument receives the changed output signal from the master via the FLOW-BUS and follows accordingly. - The slave instrument recalculates its own set values. - The PID controller of the slave instrument operates based on the new set values and supplies control signals to the pump driver. - As a result, the pump's rotation speed is controlled to regulate the flow rate of the additive to the new set value. [Application to Batch Counter] - Mass is measured, and the built-in PID controller drives the proportional valve. - External inputs are made via analog input or digital interface (RS232 or field bus). - The desired batch quantity is programmed as a limit value in the built-in counter. - When the counter reaches the limit value (batch), the valve is closed until the next reset. ● For more details, please contact us or download the catalog.
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Since 1981, Bronkhorst High-Tech B.V. has continued to provide a wide range of products in the field of thermal and Coriolis mass flow meters/controllers. Numerous types of standard or customized measuring instruments are available for use in R&D fields, various industrial sectors, or applications in hazardous locations.