We have developed a holder for wafers, disks, and circuit boards that was not needed until now.
The holding part that comes into contact with the wafer is made of PTFE fluororesin, which has excellent chemical resistance and heat resistance, and poses no risk of scratching the substrate. The USL wafer holder comes in various types, suitable for wafers, mask wafers, disks, round substrates, and square substrates, with sizes ranging from small to large.
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basic information
This is a vertical type that holds at the circumference of the wafer substrate. Code numbers: 002-1000-01 (Applicable substrate size 2.0”φ) 002-1000-02 (Applicable substrate size 3.5”φ) 002-1000-03 (Applicable substrate size 5.0”φ) 002-1000-04 (Applicable substrate size 8.0”φ) 002-1000-05 (Applicable substrate size 11.8”φ) Please contact us for other sizes.
Price range
Delivery Time
P3
Applications/Examples of results
It can be used for various purposes such as retrieval, movement, replacement, and inspection of wafer masks, wafer disks, round substrates, and square substrates.
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This is a product that meets the comfortable environment required by research and development sites. Universal Corporation continues to provide fluoropolymer products that can accommodate advanced clean environments, cleanroom products that meet high cleanliness level requirements, and static electricity control products.