We have developed a holder for wafers, disks, and substrates that was not needed until now.
The holding part that comes into contact with the wafer is made of fluoropolymer PTFE, which has excellent chemical resistance and heat resistance, and poses no risk of scratching the substrate. The USL wafer holder comes in various types for wafers, mask wafers, discs, round substrates, and square substrates, with sizes ranging from small to large.
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basic information
It is a holder specifically designed for large substrates and flat placement, supporting three points. The length can be adjusted using a sliding mechanism to accommodate various substrate sizes. Code numbers: 002-1004-01 (Applicable substrate size width 100–152 mm) 002-1004-02 (Applicable substrate size width 175–300 mm) 002-1004-03 (Applicable substrate size 100–152 φ) 002-1004-04 (Applicable substrate size 175–300 φ) Please contact us for other sizes.
Price range
Delivery Time
P3
Applications/Examples of results
It can be used for various purposes such as extraction, movement, replacement, and inspection of wafers, masks, wafers, round substrates, and square substrates.
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Company information
This is a product that meets the comfortable environment required by research and development sites. Universal Corporation continues to provide fluoropolymer products that can accommodate advanced clean environments, cleanroom products that meet high cleanliness level requirements, and static electricity control products.