We have developed a holder for wafers, disks, and circuit boards that was not needed until now.
The holding part that comes into contact with the wafer is made of PTFE fluororesin, which has excellent chemical resistance and heat resistance, and poses no risk of scratching the substrate. The USL wafer holder comes in various types, suitable for wafers, mask wafers, discs, round substrates, and square substrates, with sizes ranging from small to large.
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basic information
It is a holder specifically designed for large substrates and flat placement, supporting three points. The slide-type length adjustment allows it to be adapted to various substrate sizes. It is suitable for placing substrates in deep cases, among other uses. Code numbers: 002-1005-01 (Applicable substrate size width 100–152 mm) 002-1005-02 (Applicable substrate size width 190–300 mm) 002-1005-03 (Applicable substrate size 100–152 φ) 002-1005-04 (Applicable substrate size 190–300 φ) For other sizes, please inquire.
Price range
Delivery Time
P3
Applications/Examples of results
It can be used for various purposes such as retrieval, movement, replacement, and inspection of wafer masks, wafer disks, round substrates, and square substrates.
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This is a product that meets the comfortable environment required by research and development sites. Universal Corporation continues to provide fluoropolymer products that can accommodate advanced clean environments, cleanroom products that meet high cleanliness level requirements, and static electricity control products.