(Example: 4MHZ/13.56MHZ/27.12MHZ)
13.56MHz is a frequency band reserved for industrial, scientific, and medical purposes. It is currently the most commonly used frequency band, with 13.56MHz also being used for Suica and similar applications. *Various frequencies and outputs are supported beyond the above. Example: NR5N-XX Output frequency: 13.56MHz ±0.05% Rated output: 5000W Maximum input power: 9KVA Output impedance: 50Ω Input power: Input AC 200V ±10% 3Φ Output stability: Within ±2% of the set output Cooling method: Combined water and air cooling (7l/min) below 30℃ RF output connector: HN type
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13.56MHz is a frequency band reserved for industrial, scientific, and medical purposes. It is currently the most widely used frequency band, with 13.56MHz also being used for Suica and other applications. *Various frequencies and outputs are supported beyond the above. Example: NR5N-XX Output frequency: 13.56MHz ± 0.05% Rated output: 5000W Maximum input power: 9KVA Output impedance: 50Ω Input power: Input AC 200V ± 10% 3Φ Output stability: Within ±2% of the set output Cooling method: Combined water and air cooling (7l/min) below 30℃ RF output connector: HN type
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
RF Technologies has been involved in the development and design of high-frequency technologies since the time high-frequency power supplies began to be used in plasma processes, including "demonstration research," "material development," "surface modification," "semiconductor manufacturing," "FPD manufacturing," and "solar cells." Fortunately, we have had the opportunity for technical collaboration and exchange with academic researchers and major semiconductor manufacturing equipment manufacturers at the forefront of global technology. We have experienced many instances where the alignment of our technologies was essential to solving issues that overlap between areas that equipment manufacturers need to address and areas that power supply manufacturers need to resolve.
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