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  6. Oil rotary vacuum pump VS650A/VS750A

Oil rotary vacuum pump VS650A/VS750A

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last updated:Jan 27, 2016

アルバック/ULVAC, Inc.
アルバック/ULVAC, Inc.
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It is possible to reduce the burden associated with the installation of pumps for foundation work and other related tasks. 【ULVAC】

The VS650A/VS750A is a single-stage vane type (rotary wing type) oil rotary vacuum pump. It offers a large exhaust capacity and stable exhaust performance, and its low vibration helps reduce the burden associated with pump installation for foundation work. Additionally, you can choose between air cooling and water cooling, so please select according to your installation environment. 【Product Lineup】 ○VS650A-A ○VS650A-W ○VS750A-A ○VS750A-W For more details, please contact us or download the catalog.

    Vacuum pump
05_vs650.jpg

Oil rotary vacuum pump VS650A/VS750A

05_vs650.jpg
05_vs650.jpg
  • Related Link - http://www.ulvac.co.jp/products_j/components/vacuu…

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basic information

【Features】 ○ Large displacement single-stage vane pump → Two models available: 650m3/h and 750m3/h → By combining with a mechanical booster pump, even larger displacement exhaust is possible ○ Low vibration → Reduces low-frequency vibrations like those from oscillating piston pumps, eliminating the need for foundation work in factory buildings. Installation on upper floors is possible ○ Excellent maintainability → A large-capacity oil tank (oil volume: Max 30L) extends the oil change cycle → A large opening for cleaning the oil tank makes oil changes easy ○ Built-in oil mist filter → An oil mist filter is integrated within the oil tank → The cartridge-type filter element can be easily replaced ○ Choice of air cooling or water cooling → Air cooling or water cooling can be selected according to the installation environment → An oil cooler is used to lower oil temperature ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Applications】 ○ Vapor deposition, sputtering, ion plating ○ Vacuum drying, freeze drying, vacuum degassing ○ Leak test equipment ○ Gas replacement, filling, vacuum insulation ○ Heat treatment furnace, melting furnace ○ Various other vacuum equipment ● For more details, please contact us or download the catalog.

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Oil Rotary Vacuum Pump VS650A/VS750A

Oil Rotary Vacuum Pump VS650A/VS750A

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アルバック/ULVAC,

アルバック/ULVAC, Inc.

Electronic Components and Semiconductors

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ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.

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