Eliminating mechanical contact during high-speed rotation, achieving low vibration and high compression ratio. 【ULVAC】
The UTM series is a full-wing turbo molecular pump that employs pivot bearings (lower) and magnetic bearings (upper). By adopting pivot bearings, it eliminates mechanical contact during high-speed rotation, achieving low vibration and high compression ratios. It features high-performance bearings that are different from conventional bearing types, offering excellent characteristics. 【Product Lineup】 ○UTM-50 ○UTM-150 ○UTM-300 ○UTM-500 For more details, please contact us or download the catalog.
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basic information
【Features】 ○ The upper part uses magnetic bearings and the lower part uses pivot bearings, completely eliminating mechanical contact during high-speed rotation. → This makes bearing and oil replacement unnecessary, achieving a longer lifespan for the bearings. ○ High-speed rotation is achieved with a fine dynamic balance rotor designed with a unique blade arrangement and high-performance bearings, enabling exhaust performance for low molecular weight gases such as H2 and He (high compression ratio). ○ By adopting pivot bearings and fluorinated oil (chemically stable and low vapor pressure oil), an environment that is nearly oil-free is realized. → This enables the achievement of clean ultra-high vacuum. ○ The use of fine dynamic balance rotors and high-performance bearings results in low noise and low vibration. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Main exhaust systems for analytical devices, research and development equipment, experimental apparatus, etc. ○ Main exhaust systems for low molecular weight gases such as H2 and He ○ Main exhaust systems for analytical devices and evaluation equipment that are sensitive to vibrations ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.